Molybdenum Sputtering Target

Molybdenum sputtering target is used as resistance heating elements in furnaces, as filament supports in electric lamps, and as electrodes for mercury vapor lamps.

Why do we use molybdenum target ?

Molybdenum is a refractory metal that is commonly used to make precision machined parts. When the temperature is higher than 1000 ° C, it still has good tensile strength, has a low coefficient of thermal expansion and good electrical conductivity. It is used in the lighting industry as well as in the production of components for electronics and semiconductors.

The molybdenum sputtering target is used for magnetron sputtering coating, which is a new type of physical vapor deposition (PVD) method.An orthogonal magnetic field and an electric field are applied between the pure molybdenum target(cathode) and the anode, and the required inert gas is charged in the high vacuum chamber. Under the action of the electric field, the Ar gas is ionized to be positive. Ions and electrons, the target has a certain negative high voltage, the electrons emitted from the target are affected by the magnetic field and the ionization probability of the working gas increases, forming a high-density plasma near the cathode, and the Ar ion is in the Lorentz force. Under the action, it accelerates to the target surface and bombards the target surface at a high speed, so that the atoms sputtered on the target follow the momentum conversion principle and fly to the substrate to form a film with high kinetic energy off the target surface.

Molybdenum Sputter coating is mainly used in flat panel display, coated glass industry (mainly including architectural glass, automotive glass, optical film glass, etc.), thin film solar energy, surface engineering, recording media, microelectronics , car lights, decorative coatings, etc.