Control Of Black Particles On Tungsten Crucible Evaporated Gold Film Surface

Dec 12, 2019

The study found that when using tungsten crucibles and electron beam evaporation coating equipment to prepare gold thin films, within a certain power range, the number of black particles on the surface of the vapor-deposited gold film decreased with the increase of power and increased slightly beyond the critical power.

Improving the coating process, selecting a suitable melting gold power to stabilize, and then appropriately reducing the power, can not only reduce and stabilize the rate of gold vapor deposition, but also reduce the number of black particles on the surface of the gold vapor deposition film, which better meets micro-nano-sized device electrodes and The need for high quality gold thin films.