Research Process Of Ultrafine Tungsten Carbide Powder

Jul 27, 2020

Refractory tungsten alloys have a series of excellent physical properties and are widely used in many industries including semiconductor manufacturing. Ultrafine tungsten powder, tungsten carbide powder and ultrafine tungsten composite powder are the main raw materials for the preparation of high-quality tungsten-based electric contact materials, electronic packaging materials, integrated circuit refractory gate and barrier layer sputtering targets, electron emission materials and so on. The quality of ultrafine tungsten powder and tungsten carbide powder directly affects the final performance of these electronic tungsten-based materials. Therefore, how to produce ultrafine tungsten powder and tungsten carbide powder with low cost and high efficiency is of great significance to semiconductor manufacturing industry.

The preparation of ultrafine tungsten carbide powder is actually a carbonization process of ultrafine tungsten powder. The particle size and composition of tungsten powder are the most important factors affecting the particle size and composition of tungsten carbide powder. As the carbonization process is mainly realized by the reaction between the surface of tungsten powder particles and the gas containing carbon and the diffusion of solid carbon black into the tungsten powder, the carbonization temperature, carbonization time and carbon content of materials have relatively little influence on the particle size of tungsten carbide powder. The process system of preparing tungsten carbide powder was established through repeated verification and the ultrafine tungsten carbide powder with uniform particle size was prepared. Ultrafine tungsten powder and tungsten carbide powder have poor dispersion and uniformity. The agglomeration of powder can be eliminated to a great extent, and the powder can be further refined and the particle size distribution is reasonable. The use of air crushing classification equipment for processing high production efficiency, low energy consumption, and simple operation, easy to control. The dispersion and uniformity of the ultrafine powder prepared were greatly improved, and the particle size composition was obviously improved. Reduce the production process control difficulty, completely solve the traditional production process of ball grinding, sieving difficult problems, greatly improve the production efficiency, shorten the production cycle.