Secondary Resource Utilization Makes Refractory Metal 'rebirth In Furnace'

Sep 06, 2019

Tungsten, tantalum, niobium, rhenium and molybdenum... Refractory metals are of great importance in nuclear energy, aerospace, electronic information and medical diagnosis and treatment, which are related to national security, economy and people's livelihood. However, in the past 10 years, most of the tungsten resources consumed by the world's tungsten industry came from China, resulting in a sharp decline in China's reserves of such high-quality strategic resources.

26, the reporter learns from Beijing institute of technology, ten years grinding sword, by the Beijing institute of technology, China shipbuilding industry corporation DiQiYiBa research institute, China institute of atomic energy of kunming university of science and technology and the project team, based on the secondary resources use high-end refractory metal products research and development and application of a major breakthrough.

"By applying the basic research and industrialization, the team created from recycling waste, to electronic WF6 gases, high purity tungsten spare parts and other products the whole chain of industrialization technology, break through the WF6 high fluoride production and purification, high purity tungsten target materials, tungsten heater, different atmospheric pressure chemical vapor deposition of tungsten crucible manufacturing, based on exhaust gas using plasma chemical preparation of high-purity ultrafine tungsten powder, by-products of HF F2 / NF3 and H2 electrowinning and its application in the production and restore WF6 and other key technology." "Said tan chengwen, a professor at Beijing institute of technology who is in charge of the project.

After about 10 years of efforts, the project team has developed a series of high-end products, such as high-purity WF6, ultra-high-purity tungsten target, high-purity tungsten parts for ion implantation machine, high-performance tungsten heater, and high-purity heterotype tungsten crucible.

Cheng-wen tan said, among them, high purity WF6 99.999% purity, satisfy the high purity requirements of special gases for the semiconductor industry, at Intel, Toshiba, TSMC, smic and so on well-known semiconductor companies are widely used both at home and abroad, the domestic market share of 80%, international market share of nearly 25%, only three years to achieve a single product output value over one hundred million yuan, the profit margin is greater than 20%. With the continuous improvement of technology, the use of products in related enterprises has been greatly increased, breaking the foreign monopoly. The purity of ultra-high purity tungsten target material, high purity tungsten parts for ion implantation machine, tungsten heating body and heterologous tungsten crucible is 99.999999%.